Facility MaintenanceMaintenance of Semiconductor Manufacturing Equipment
We propose the optimal maintenance services for diverse conditions, and contribute to our customers' cost reductions and uptime improvement through our services.
Features
- Supporting the life cycle of semiconductor manufacturing equipment with our engineering capabilities.
- Experienced technicians respond quickly in Japan and other locations according to the customer's request.
- Our technical capabilities enable repairs or modifications to units with parts that are difficult to obtain due to their age, thereby extending operational life.
- Provision of high quality refurbished equipment at a low price and quick lead time.
Basic Services
■Maintenance service
We make proposals in pursuit of improved uptime, and maintenance and management of equipment.
＜Main services＞
Field services such as periodic inspections and troubleshooting; preventive maintenance; maintenance by stationed technicians; equipment dismantling and relocation; ancillary facility services; etc.
■Repair service
We provide reliable repair techniques based on our many years of experience.
＜Items handled＞
PC boards, various power supply units, RF-related equipment, mass flow controllers, heat exchangers, etc.
■Equipment refurbishment service
We offer superior technical capabilities with a proven track record.
＜Items handled＞
CVD equipment, PVD equipment, exposure equipment, etching equipment, etc.
Special Services
■Equipment life extension service
We extend the life of older equipment and devices with an extensive menu of services.
＜Features＞
- Utilization of alternative technologies for equipment that cannot be repaired due to unavailability of parts, etc.
- Reduce costs by repair-based approach and improved reliability by alternative technologies
■Online communications service
Automated product start-up processing through remote control.
＜Features＞
- Mediation between the customer's production control system and equipment, and remote control though command transfer
- Linkage between related products, such as AI anomaly determination, data collection, etc.