Equipment refurbishment service

Facility MaintenanceMaintenance of Semiconductor Manufacturing Equipment

We propose the optimal maintenance services for diverse conditions, and contribute to our customers' cost reductions and uptime improvement through our services.

Features

  • Supporting the life cycle of semiconductor manufacturing equipment with our engineering capabilities.
  • Experienced technicians respond quickly in Japan and other locations according to the customer's request.
  • Our technical capabilities enable repairs or modifications to units with parts that are difficult to obtain due to their age, thereby extending operational life.
  • Provision of high quality refurbished equipment at a low price and quick lead time.

Basic Services

■Maintenance service

We make proposals in pursuit of improved uptime, and maintenance and management of equipment.

<Main services>

Field services such as periodic inspections and troubleshooting; preventive maintenance; maintenance by stationed technicians; equipment dismantling and relocation; ancillary facility services; etc.


■Repair service

We provide reliable repair techniques based on our many years of experience.

<Items handled>

PC boards, various power supply units, RF-related equipment, mass flow controllers, heat exchangers, etc.


■Equipment refurbishment service

We offer superior technical capabilities with a proven track record.

<Items handled>

CVD equipment, PVD equipment, exposure equipment, etching equipment, etc.

Special Services

■Equipment life extension service

We extend the life of older equipment and devices with an extensive menu of services.

<Features>

  • Utilization of alternative technologies for equipment that cannot be repaired due to unavailability of parts, etc.
  • Reduce costs by repair-based approach and improved reliability by alternative technologies

■Online communications service

Automated product start-up processing through remote control.

<Features>

  • Mediation between the customer's production control system and equipment, and remote control though command transfer
  • Linkage between related products, such as AI anomaly determination, data collection, etc.